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| ZenoOCR™ (Zeno OCR) |
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| Semiconductor Line Processor |
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| Fab Vision/SI |
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| The Cheongju business site of Hynix
Semiconductor Inc. |
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| - The semiconductor process is
automated and can make accurate and fast OCR readings and determine
mismatches with the given information |
| - Since it is automated up to the
communication process, it minimizes the probability for human
error |
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| - Provides solutions for the systematic
classification, saving and review of defects which may appear
at the wafer edges, including the plat zone |
| - Semi-automated for convenient
operation |
| - It can directly make measurement
without making any impact on the existing process because it
employs Scope’s stage mechanism. |
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