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| McCoy™ (McCoy (means ‘The Real’) |
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| Semiconductor Line Processor |
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| Fab Vision/SI |
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| The Cheongju business site of Hynix
Semiconductor Inc. |
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| - Can easily be adjusted and used
with an existing Fabout |
| - It has higher accuracy, compared
to bare-eye examinations, has a systematic classification and
saving system for edge defects, and has the ability to make
post-analyses and reviews |
| - Can prevent wafer breakage due
to the treatment errors |
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| - Provides solutions for the systematic
classification, saving and review of defects which may appear
at the wafer edges, including the plat zone |
| - Semi-automated for convenient
operation |
| - It can directly make measurement
without making any impact on the existing process because it
employs Scope’s stage mechanism. |
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