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| ZenoSPC™ (Statistical Process Control) |
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| Semiconductor Line Processor |
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| FAB Monitoring/SI |
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| The Cheongju business site of Hynix
Semiconductor Inc. |
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| - Ability to expand mastery over
the statistical process control (SPC), which is generally used
in semiconductor manufacturing line, not just with the managers,
but also to the entire company, including the operator at the
site. |
| - Ability to synchronize all flexible
SPEC information about various recipes used for CD-SEN measurement
in real time with the information possessed by the development
and computer department, as well as the operator on site |
| - Ability of managers to always
gain accurate SPC analyses at any time he/she wants (including
graphs) |
| - Through the removal of the SPEC
sheet from the site, a clean & paperless production system
is made possible. |
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| - The touch monitor allows the
user to conveniently read and review without the need for any
input tool. |
| - The optimized interface maximizes
the efficiency at the work site. |
| - Ability to create and export
customized trend graphs for the reader, who then sees the SPC. |
| - Ability to respond to any kind
of communication base, such as Port, R/V, D/B etc, used internally
in the company. (synchronization with the computer network) |
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